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In Situ Particle Detectors
INFICON Stiletto® is a scanning-laser particle detection system that can find yield-limiting particle contamination in real time on every wafer. Its increased particle detection area and accurate particle counting and sizing, enable yield and productivity improvements for the most advanced semiconductor processes.
INFICON Stiletto is capable of in situ metrology and process control, enabling yield and productivity improvements for the most advanced semiconductor processes. Stiletto is the first in situ particle monitoring system to be fully integrated with the process tool. When combined with parametric tool data, particle counts can be overlaid with equipment status to allow engineers to identify the exact time and cause of particle formation. The ability of INFICON Stiletto to detect particles during every run of every wafer provides unprecedented protection against defect-induced yield loss.
INFICON Stiletto resonant scanner continuously monitors a much larger volume than the stationary laser beam systems used in existing in situ particle monitors, so Stiletto is able to provide statistically significant count rates for process control. In addition, repeatedly scanning the same volume permits auto-correlation, an advanced signal processing technique that virtually eliminates false counts. This combination of cutting-edge technologies delivers submicron sensitivity that detects "killer particles" while avoiding nuisance events. So you get reliable fault detection for every wafer, every run, every time.
Stiletto Scanning-Laser Particle Detector
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