Superior Sensitivity for Contamination Control
The Transpector® Gas Analysis System is an RGA that provides accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection in semiconductor and solar/photovoltaic manufacturing applications. In the Transpector 2, increased hydrogen sensitivity makes contaminants visible at sub-ppm levels, and four times faster scanning over low level signals with an expanded dynamic range provides cleaner data at lower detectable partial pressures.
Features at a Glance
- 100-,200-,and 300-amu systems with Faraday cup or combination electron multiplier/Faraday cup
- improved hydrogen detection
- superior peak amplitude and position stability
- up to 10 times improvement in signal to noise ratio compared to original Transpector
- faster scanning over low-level signals
- nine-decade electronic dynamic range
- software options for single and multi-chamber systems
- partial pressure measurement from 1 X 10 -4 Torr to 5 X 10 -15 Torr
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
Technical Information:
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Calculating Partial Pressures
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Calculating Sensitivity for RGA Partial Pressures
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Choosing the Appropriate RGA
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General RGA Spectrum Interpretation Guide
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Heating Jackets Can Improve RGA Performance
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New Digital Input/Output Board for Transpector Gas Analysis System Using TWare 32
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Partial Pressure vs. Total Pressure for an Open Ion Source RGA
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Residual Gas Analyzers for Contamination Checking
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Residual Gas Analyzers for Leak Detection
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The Advantages of an RGA with Analog Outputs
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The Practical Use of Residual Gas Analysis in a Semiconductor Thermal Processing Module
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Transpector 2 Improvements Lead to Better Process Monitoring
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