Comprehensive Gas Analysis Made Affordable
INFICON Transpector® CPM provides in situ early warnings and lowers costs by:
- measuring gas phase reactions
- verifying vacuum integrity
- identifying trace-level contaminants
- measuring process and background composition
- qualifying gas purity
The INFICON CPM Compact Process Monitor is a full-featured, compact and affordable gas analyzer that's ideally suited for in situ monitoring of complex processes. This dry-pumped system uses the proven technology of the INFICON Transpector 2 Gas Analysis System to help achieve new levels of performance.
CPM Features at a Glance:
- quadrupole-based gas analysis system for monitoring complex processes.
- allows 24/7 monitoring to maximize yield and throughput, thereby minimizing costs.
- compact and affordable enough to be installed on every high-pressure vacuum chamber.
- HexBlock™ sampling system maximizes performance.
- built-in CDG for process pressure monitoring and vacuum interlock.
- optional calibration reference available for tuning and gas reference.
- long-life closed ion source permits contaminant detection at sub-ppm levels while resisting most corrosive and reactive gases.
- lightweight and easily transportable.
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Brochure - Transpector CPM Compact Process Monitor
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Technical Information:
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Technical Note - Choosing the Appropriate RGA
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Technical Note - Etch Process Monitoring with the Transpector Residual Gas Analyzer
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Technical Note - Gas Purge and CPM Sensor Lifetime
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Technical Note - Heating Jackets Can Improve RGA Performance
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Technical Note - The Optimization of Electron Energy for RGAs
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Technical Note - Transpector CPM Calibration Reference
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The Use of Quadrupole Mass Spectrometry to Detect Sub-PPM Level Contaminants in Gas-Phase Samples and Processes
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Transpector CPM - Integrated Process Monitor for 300mm High Pressure Degas
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