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Transpector CPM Compact Process Monitor
Comprehensive Gas Analysis Made Affordable
INFICON Transpector® CPM provides in situ early warnings and lowers costs by:
- measuring gas phase reactions
- verifying vacuum integrity
- identifying trace-level contaminants
- measuring process and background composition
- qualifying gas purity
The INFICON CPM Compact Process Monitor is a full-featured, compact and affordable gas analyzer that's ideally suited for in situ monitoring of complex processes. This dry-pumped system uses the proven technology of the INFICON Transpector 2 Gas Analysis System to help achieve new levels of performance.
CPM Features at a Glance:
- quadrupole-based gas analysis system for monitoring complex processes.
- allows 24/7 monitoring to maximize yield and throughput, thereby minimizing costs.
- compact and affordable enough to be installed on every high-pressure vacuum chamber.
- HexBlock™ sampling system maximizes performance.
- built-in CDG for process pressure monitoring and vacuum interlock.
- optional calibration reference available for tuning and gas reference.
- long-life closed ion source permits contaminant detection at sub-ppm levels while resisting most corrosive and reactive gases.
- lightweight and easily transportable.
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