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Transpector HPR Gas Analysis System
Consistent Sensitivity for Optimal Contamination Control
The INFICON Transpector HPR combines the high performance of a Transpector RGA with a calibration reference to make an automated instrument for performing tool diagnostics and monitoring. Combined with the powerful capabilities of INFICON FabGuard Sensor Integration and Analysis System, Transpector HPR has the ability to monitor itself, as well as monitor the tool for discrepancies and flaws in the process.
General Applications:
- helium leak detection of various tool modules
- monitoring of module conditions for preventive maintenance purposes
- record data after preventive maintenance
- rate of rise measurements
- background condition monitoring
Features at a Glance:
- various AMU mass ranges with a combination Faraday cup / electron multiplier
- automatic EM gain adjustments
- nine decades of dynamic range
- automatic tuning of mass position and resolution
- variable dwell times for superior signal-to-noise ratios
- MDPP of 5E-15 Torr (100 AMU version)
LIBRARY
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