PVD Process Monitoring Without Complex Pressure Conversion
Process monitoring with Transpector XPR3 RGA can provide you with real-time data on contamination levels, outgassing levels, gas purity and equipment operation. This information can be used to maximize throughput and yield, reduce waste by detecting and diagnosing problems, and increase tool uptime by making preventive maintenance programs more efficient and effective.
Transpector XPR3 is the next generation in high-pressure, quadrupole-based process gas analysis. It builds on the success of previous INFICON systems to allow monitoring of physical vapor deposition (PVD) processes with unprecedented sensitivity, accuracy, and flexibility. A series of technological breakthroughs allow the compact Transpector XPR3 to operate from 20 mTorr to ultrahigh vacuum without the need for large, complex pressure conversion equipment.
Features at a Glance:
- redesigned ion source minimizes contamination buildup for extended life and provides cleaner signals.
- new EM works at PVD process pressures, providing faster, cleaner data collection and eliminating FC to EM transitions for easier interpretation of data.
- new longer quadrupole permits improved filtering at the low mass range and improved abundance sensitivity, for better hydrogen detection sensitivity.
Transpector XPR3 Applications:
- PVD process modules
- preclean modules
- non-cluster PVD tools
- clamped degas modules
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Brochure - Transpector XPR3 Gas Analysis System
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Technical Information:
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Heating Jackets Can Improve RGA Performance
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Technical Note - Choosing the Appropriate RGA
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Technical Note - he Optimization of Electron Energy for RGAs
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Transpector XPR3 Gas Analysis System - Best Known Methods
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