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RF Sensing Technology with FabGuard
INFICON market leading RF Sensing Technology combines the latest technical advancements in RF sensor design with quality manufacturing procedures to create a unique range of RF products to meet today's semiconductor tool process measurement needs. From simple applications like arc detection and chamber clean endpoint control to full-frequency discriminate RF analysis for predictive modeling, INFICON offers the best product portfolio to meet your RF sensing needs.
Sion RF Detector for Plasma Arc Detection
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