The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5 X 10 -10 mbar to atmosphere (3.8 X 10 -10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economical package.
Advantages
- Extremely wide measurement range from 5 X 10 -10 mbar to atmosphere (3.8 X 10 -10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10 -8 ... 10 -2 mbar of 5%
- The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
- Long-life yttrium oxide coated iridium filament
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
Applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Datasheet - BPG400, BPG400-SD, BPG400-SP, BPG400-SR (tiba15e1-a)
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Operating Manual - BPG400, BPG400-SD, BPG400-SP, BPG400-SR (tina03e1-b)
English
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Operations and Maintenance Manuals:
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Communication Protocol - BPG400-SD, HPG400-SD (tira03e1-b)
English
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Communication Protocol - BPG400-SP, HPG400-SP (tira36e1-a)
English
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EDS for BPG400-SD with Float EDS for BPG400-SD with Float Configuration
English
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EDS for BPG400-SD with Integer EDS for BPG400-SD with Integer Configuration
English
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Instruction Sheet - BPG400, BPG400-SD, BPG400-SP, BPG400-SR (tima03e1-b)
English
| German
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Instruction Sheet - BPG400-SD, BPG400-SP, BPG400-SR (tima36e1-b)
English
| German
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Operating Manual - BPG400, BPG400-SD, BPG400-SP, BPG400-SR (tina03e1-b)
German
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