All vacuum exposed surfaces of the SKY AllCeramic CDG are constructed of ultra-pure aluminum oxide ceramic, replacing the stainless steel tubing of our traditional CDG. This product is preferred in applications where metal contamination must be avoided.
Advantages
- No metal contamination
- Marginal zero drift
- Virtually corrosion proof - long sensor life results in reduced downtime thus reducing cost of ownership
- Superior accuracy and repeatability over long periods of operation
- Better long term and temperature stability
- Eliminates isolation valve (depending on operation mode)
- Less susceptible to particles and process by-products due to suprashield
- Fastest warm-up time
- Lower cost of investment
- Drop-in replacement of existing CDGs due to interface compatibility
Applications
- Etch, CVD and PVD processes
- Doping silicon using implantation or diffusion processes
- Oxidation
- Creation of gate oxide layer in the range of 100
- Creation of barrier layers (Ti, TiN, Ta and TaN as a protection layer between Silicon and Aluminum or Copper
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Datasheet - CDG025 All Ceramic Capacitance Diaphragm Gauge
English
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Operations and Maintenance Manuals:
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Operating Manual - CDG025-C (tinz11e1.pdf)
English
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Technical Information:
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On the Stability of Capacitance-Diaphragm Gauges with Ceramic Membranes - JVST Jan/Feb 2011
English
| Chinese
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