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> FabGuard Suite
> Guardian Co-Deposition Controller
> Helium Leak Detectors
> RF Sensing Technology with FabGuard
> Stiletto In Situ Particle Detectors
> Transpector Residual Gas Analyzers
> Vacuum Components
>Vacuum Gauges
> Vacuum Valves and Gas Dosing Systems
View our Vacuum Control Catalog (pdf)

Vacuum Gauges


INFICON vacuum gauges offer superior accuracy and reliability in compact designs. Combining multiple technologies in a single controller for total pressure measurement and control of vacuum processes.

  • INFICON ceramic capacitance diaphragm gauges (CDG) outperform all metal-diaphragm CDGs in temperature and mechanical stability, zero drift, accuracy, repeatability, and corrosion resistance. Innovating beyond conventional technology, INFICON ceramic capacitance diaphragm gauges use an ultrapure aluminum oxide ceramic diaphragm, replacing traditional metal diaphragms, for vacuum measurements of superior accuracy and repeatability.

  • INFICON gas-type-independent Pirani Capacitance Diaphragm combines patented dual Pirani sensors and gas-type-independent ceramic capacitance diaphragm technology in a money-saving, space-saving gauge.

  • INFICON Bayard Alpert Capacitance Diaphragm Gauge measures 13 decades using one compact gauge, one connection, one sensor cable and one A/D converter, dramatically reducing complexity and cost.

SKY Capacitance Diaphragm Gauges

Hot Ionization Gauges

Pirani Gauges

Cold Cathode Gauges

Vacuum Gauge Controllers

Vacuum Switch