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Penning Gauge PEG050


The INFICON Penning Gauge, PEG050, provides reliable high vacuum measurements. The rugged Penning cold cathod sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition, the gauge can be operated also in sputtering applications.

Advantages
  • Rugged
  • Insensitive to air inrushes and vibrations
  • Easy disassembly and cleaning of the measurement system
  • Exchangeable cathode plate
  • Improved ignition characteristics through patented anode design
  • Titan cathode plates grant longer lifetime

Operating Units
  • Vacuum Gauge Controller VGC023

LIBRARY

 Datasheet - PEG050 (tiba18e1.pdf)
 Gebrauchsanleitung - PEG050 (tina13d1-.pdf)
 Operating Manual - PEG050 (tina13e1.pdf)

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