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Products:
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Electron Beam Gun Crucible Indexer |
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FabGuard Software Suite |
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Guardian Co-Deposition Controller |
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Leak Detectors |
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Quartz Crystal Sensors |
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Quartz Monitor Crystals |
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RF Sensing Technology |
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Residual Gas Analyzers |
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Thin Film Deposition Controllers/Monitors |
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Vacuum Components |
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Vacuum Gauges |
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Vacuum Valves and Gas Dosing Systems |
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Angle and Inline Valves, DN 16 - 250 |
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Angle and Inline Valves, DN 5 |
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Ball Valves, DN 10-40 |
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Butterfly Valves, DN 63 to 250 ISO |
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Diaphragm Valves, Manually Actuated |
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Gas Dosing Systems |
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Gas Dosing Valves |
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ISO-KF Valves (DN 16, 25, 40), manual |
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ISO-KF Valves (DN 16, 25, 40), pneumatic and electropneumatic |
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Safety Valves |
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Venting Valves |
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Safety Valves
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Vacuum Safety Valves VSM DN16 - DN100
- Fast-closing high vacuum isolation valve for separating the vacuum chamber from the backing pump
- Venting valve for roughing pumps
- Immediate closing action upon power failure
- Opening action only after the intake line has been evacuated
Power Failure Venting Valve VIM010-A
- For automatic venting of pumps, system or vacuum chambers in case of a power failure
Pressure Relief Valve VSA016-X
- Protects vacuum systems from pressure >1.5 bar
- Relief trigger point 1.2 to 1.5 bar absolute
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Datasheet - VIM010-A (siba34e1.pdf)
English
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Datasheet - VSA016-X (siba35e1.pdf)
English
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Instruction Sheet - VSM016 ... 040-AA, Safety Valves (sima82e1_b.pdf)
English
| German
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Instruction Sheet - VSM063 ... 100-A, Safety Valves (sima33e1.pdf)
English
| German
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Instruction Sheet - VSM063 ... 100-AA, Safety Valves (sima83e1_b.pdf)
English
| German
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Operating Manual - sina82e1, VSM016 ... 040-AA, Safety Valves (sina82e1.pdf)
English
| German
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Operating Manual - sina83e1, VSM063 ... 100-AA, Safety Valves (sina83e1.pdf)
English
| German
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Operations and Maintenance Manuals:
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Operating Manual - VSM016 ... 040-A, Safety Valves (sina32e1.pdf)
English
| German
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Operating Manual - sina33e1, VSM063 ... 100-A, Safety Valves (sina33e1.pdf)
English
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Operating Manual - sina62e1, VSA016-X, Pressure Relief Valve (sina62e1.pdf)
English
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