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Products:
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Electron Beam Gun Crucible Indexer |
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FabGuard Software Suite |
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Guardian Co-Deposition Controller |
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Leak Detectors |
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Quartz Crystal Sensors |
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Quartz Monitor Crystals |
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RF Sensing Technology |
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Residual Gas Analyzers |
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Thin Film Deposition Controllers/Monitors |
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Vacuum Components |
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Vacuum Gauges |
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Vacuum Valves and Gas Dosing Systems |
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Angle and Inline Valves, DN 16 - 250 |
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Angle and Inline Valves, DN 5 |
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Ball Valves, DN 10-40 |
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Butterfly Valves, DN 63 to 250 ISO |
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Diaphragm Valves, Manually Actuated |
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Gas Dosing Systems |
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Gas Dosing Valves |
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ISO-KF Valves (DN 16, 25, 40), manual |
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ISO-KF Valves (DN 16, 25, 40), pneumatic and electropneumatic |
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Safety Valves |
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Venting Valves |
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Angle and Inline Valves, DN16 - 250
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Angle and Inline Valves (VAH, VIH, VAP, VIP) DN16, DN25, DN40
Manually Actuated
- Bellows feedthrough
- Quick opening with 130 o turn
- Soft start in four steps
Pneumatically Actuated
- Bellows feedthrough
- Visual indication of the open and closed position
- Electrical position indicator for open and closed position
- For system manufacturers- without pilot valve, without position indicator
- Extremely long service life
Solenoid Actuated Angle Valves with ISO-KF Flanges (VAM) DN16-40
- Bellows feedthrough
- High conductance
- Compact design
- Electrical and visual (LED)position indication
- Selectable operating mode: Remote control via PLC or PC, Local operation
- Wide voltage range
Angle Valves (VAH, VAP) DN63
Manually Actuated
- Spindle drive with hand wheel
- Smooth opening
- Visual position indication
Pneumatically Actuated
- Visual indication for open and closed position
- Electrical position indicator for open and closed position
- For system manufacturers without pilot valve
Manually Actuated Angle Valves with CF-Flanges (VAH) DN16-63
Standard
- For UHV and HV applications
- Bakeable at up to 180 o C in open and closed position
- FPM sealed
- Maintenance-free
All-metal
- For UHV applications
- Bakeable at up to 300 o C in open and closed position
- Copper sealed
- Maintenance-free
Angle Valves (VAH, VAP) DN100
Manually Actuated
- Bellows feedthrough
- Spindle drive with hand wheel
- Smooth opening
- Visual position indication
Pneumatically Actuated
- Bellows feedthrough
- Visual indication of the open and closed position
- Electrical position indicator for open and closed position
- For system manufacturers without pilot valve
Angle Valves (VAP) DN160
- Visual indication for open and closed position
- Electrical position indicator for open and closed position
- For system manufacturers without pilot valve
Pneumatically Actuated Angle Valve (VAP) DN250
- Visual indication for open and closed position
- Electrical position indicator for open and closed position
- Bellows feedthrough
- High conductance
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Data Sheet - VAH DN16-63 CF-R (siba18e1_a.pdf)
English
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Data Sheet - VAH, VAP DN100 (siba16e1.pdf)
English
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Data Sheet - VAH, VAP DN63 (siba15e1.pdf)
English
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Data Sheet - VAH, VIH, VAP, VIP DN16 (siba12e1.pdf)
English
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Data Sheet - VAH, VIH, VAP, VIP DN25 (siba13e1.pdf)
English
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Data Sheet - VAH, VIH, VAP, VIP DN40 (siba14e1.pdf)
English
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Data Sheet - VAM DN16-40 ISO-KF (siba19e1.pdf)
English
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Datasheet - VAP DN160 (siba17e1.pdf)
English
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Datasheet - VAP DN250 (siba20e1.pdf)
English
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Instruction Sheet - VAH016-A/X, VAH025-A/X, VAH040-A/X (sima53e1_a.pdf)
English
| German
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Instruction Sheet - VAH016-U, VAH040-U, VAH063-U (sima01e1-a.pdf)
English
| German
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Instruction Sheet - VAH016-Z, VAH040-Z, VAH063-Z (sima02e1.pdf)
English
| German
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Instruction Sheet - VAH063-A/X, VAH100-A/X (sima43e1-a.pdf)
English
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Instruction Sheet - VAM016-A/X, vam025-A/X (sima34e1-a.pdf)
English
| German
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Instruction Sheet - VAP016-A/X, VAP025-A/X, VAP040-A/X (sima90e1.pdf)
English
| German
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Instruction Sheet - VAP016-A/X, VAP025-A/X, VAP040-A/X (sima45e1-a.pdf)
English
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Instruction Sheet - VAP016-A/X, VAP025-A/X, VAP040-A/X (sima46e1.pdf)
English
| German
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Instruction Sheet - VAP016-A/X, VAP025-A/X, VAP040-A/X (sima60e1-b.pdf)
English
| German
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Instruction Sheet - VAP016-A/X, VAP025-A/X, VAP040-A/X (sima84e1-b.pdf)
English
| German
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Instruction Sheet - VAP016-AZ/XZ, VAP025-AZ/XZ, VAP040-AZ/XZ (sima89e1.pdf)
English
| German
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Instruction Sheet - VAP063-A/X, VAP100-A/X, VAP160-A/X (sima41e1-a.pdf)
English
| German
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Instruction Sheet - VAP063-A/X, VAP100-A/X, VAP160-A/X (sima40e1-a.pdf)
English
| German
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Instruction Sheet - VAP063-A/X, VAP100-A/X, VAP160-A/X (sima44e1.pdf)
English
| German
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Instruction Sheet - VIH016-X, VIH025-X, VIH040-X (sima54e1-a.pdf)
English
| German
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Instruction Sheet - VIP016-X, VIP025-X, VIP040-X (sima50e1-a.pdf)
English
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Instruction Sheet - VIP016-X, VIP025-X, VIP040-X (sima49e1-a.pdf)
English
| German
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Instruction Sheet - VIP016-X, VIP025-X, VIP040-X (sima61e1-b.pdf)
English
| German
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Operating Manual - VAP063-A/X, VAP100-A/X, VAP160-A/X (sina40e1.pdf)
English
| German
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Operating Manual - VIP016-X, VIP025-X, VIP040-X (sina49e1.pdf)
English
| German
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Operating Manual - VIP016-X, VIP025-X, VIP040-X (sina61e1-a.pdf)
English
| German
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Operations and Maintenance Manuals:
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Instruction Sheet - VAH063-A/X, VAH100-A/X (sima43e1-a.pdf)
German
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Operating Manual - VAH016-U, VAH040-U, VAH063-U (sina01e1-a.pdf)
English
| German
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Operating Manual - VAH016-z, VAH040-Z, VAH063-Z (sina02e1.pdf)
English
| German
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Operating Manual - VAH063-A/X, VAH100-A/X (sina43e1.pdf)
English
| German
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Operating Manual - VAM016-A/X, vam025-A/X, VAM040-A/X (sina34e1-a.pdf)
English
| German
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Operating Manual - VAP016-A/X, VAP025-A/X, VAP040-A/X (sina45e1.pdf)
English
| German
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Operating Manual - VAP016-A/X, VAP025-A/X, VAP040-A/X (sina46e1.pdf)
English
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Operating Manual - VAP016-A/X, VAP025-A/X, VAP040-A/X (sina60e1-a.pdf)
English
| German
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Operating Manual - VAP016-A/X, VAP025-A/X, VAP040-A/X (sina84e1-b.pdf)
English
| German
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Operating Manual - VIH016-X, VIH025-X, VIH040-X (sina54e1.pdf)
English
| German
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Operating Manual - VIP016-X, VIP025-X, VIP040-X (sina50e1.pdf)
English
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