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Products:
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Electron Beam Gun Crucible Indexer |
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FabGuard Software Suite |
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Guardian Co-Deposition Controller |
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Leak Detectors |
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Quartz Crystal Sensors |
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Quartz Monitor Crystals |
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RF Sensing Technology |
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Residual Gas Analyzers |
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Thin Film Deposition Controllers/Monitors |
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Vacuum Components |
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Vacuum Gauges |
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Vacuum Valves and Gas Dosing Systems |
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Angle and Inline Valves, DN 16 - 250 |
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Angle and Inline Valves, DN 5 |
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Ball Valves, DN 10-40 |
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Butterfly Valves, DN 63 to 250 ISO |
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Diaphragm Valves, Manually Actuated |
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Gas Dosing Systems |
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Gas Dosing Valves |
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ISO-KF Valves (DN 16, 25, 40), manual |
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ISO-KF Valves (DN 16, 25, 40), pneumatic and electropneumatic |
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Safety Valves |
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Venting Valves |
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Gas Dosing Systems
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Gas Dosing Systems
- Higher yield
- Optimized cycle time
- Excellent reproducibility
- Easy system integration
Control Valve VDM005-X
- Fast response
- Wide control range at low cost
- Withstands corrosive gases - stainless steel /FPM
- Closed automatically in case of a power failure
- Smooth electromagnetic drive
Control Valve VDE016-X
- Broad control range
- Excellent reproducibility
- Status information and commands via digital interface
- Withstands corrosive gases - stainless steel / FPM
- Combined with the VCC500-Z controller, the valve closes automatically in case of a power failure
Controller VCC500-Z
- Simple operation - user friendly LCD display and function keys
- Analog - digital inputs, outputs and interfaces
- 99 PI pre-programmed control adjustments for quick and easy operation
- Adjustable PID control algorithm
- Wide variety of pre-programmed pressure gauges
Interface Module VCA200-Z
- Easy and economical system integration
- Connects an RS232C interface to the digital interface of Control Valve VDE016-X
- Inquiry of status and valve position
ASSOCIATED TECHNICAL INFORMATION
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Datasheet - Gas Dosing Systems (siba09e1.pdf)
English
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Datasheet - VDM005A-X (siba38e1-a.pdf)
English
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Installation Manual - VCC500, VGC012/023/401/402/403, (tiqa01d2.pdf)
English
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Instructions Sheet - VDE040-U, All-Metal Control Valve (sima04e1.pdf)
English
| German
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Instructions Sheet - VDH040-U, All-Metal Dosing Valve (sima03e1.pdf)
English
| German
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Operating Manual - VCE500, Controller (sina66e1.pdf)
English
| German
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Operating Manual - VDE016-X (sina35e1-d.pdf)
English
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Operating Manual - VDE040-U, All-Metal Control Valve (sina04e1.pdf)
German
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Operating Manual - VDE040-U, All-Metal Control Valve (sina04e1.pdf)
English
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Operating Manual - VDH010-A, Coarse Dosing Valve (sina68e1.pdf)
English
| German
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Operating Manual - VDH016-X, Dosing Valve (sina64e1.pdf)
English
| German
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Operating Manual - VDH040-U, All-Metal Dosing Valve (sina03e1.pdf)
English
| German
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Operating Manual Heating Jacket for VDE040- U, VDH040-U, (pages 3-4) (sina69d2.pdf)
German
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