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Products:
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Electron Beam Gun Crucible Indexer |
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Guardian Co-Deposition Controller |
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Quartz Crystal Sensors |
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Quartz Monitor Crystals |
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RF Sensing Technology |
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Residual Gas Analyzers |
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Thin Film Deposition Controllers/Monitors |
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Vacuum Components |
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Vacuum Gauges |
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Vacuum Valves and Gas Dosing Systems |
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Angle and Inline Valves, DN 16 - 250 |
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Angle and Inline Valves, DN 5 |
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Ball Valves, DN 10-40 |
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Butterfly Valves, DN 63 to 250 ISO |
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Diaphragm Valves, Manually Actuated |
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Gas Dosing Systems |
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Gas Dosing Valves |
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ISO-KF Valves (DN 16, 25, 40), manual |
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ISO-KF Valves (DN 16, 25, 40), pneumatic and electropneumatic |
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Safety Valves |
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Venting Valves |
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Angle (VAP) and Inline (VIP) Pneumatic and Electropneumatic Actuated Valves
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The INFICON ISO-KF valve line, VAP / VIP016...040-A/X, performs as a gauge isolation, bypass, rough or venting valve and is well suited for all general high vacuum and semiconductor processes. The improved industrial design results in a rugged, compact, highly reliable valve with a low cost of ownership. The All-in-One concept means the valve is fast and easy to install and the pilot valve and electrical position indicator are integrated for convenient "plug and play" use. The proven All-in-One design and extremely long service life make this valve easy to maintain. The new line is fully compatible with the current INFICON VAP / VIP016...040-A/X valve line.
Features / Benefits
- All-in-One design for fast and easy installation; one connector for pilot valve and electrical position indicator for easiest "plug and play"
- Direct pneumatic actuation or via integrated pilot valve
- Normally open and normally closed versions available
- Electrical and visual position indicator, standard
- 10 million cycle 316L stainless steel bellows
- Easy maintenance, fast bellows and seal replacement
- Fast opening and closing time
- High conductance for fast pump down or venting
- High differential pressure resistance
- FPM sealing standard, other sealing materials available upon request
- High purity aluminum or stainless steel housing
INFICON also offers a full line of ISO-KF manually actuated valves. Click here for more information.
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Datasheet - Angle (VAP) and Inline (VIP) Valves, Pneumatically Actuated (siba39e1-b.pdf)
English
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Datasheet - Angle (VAP) and Inline (VIP) Valves, Pneumatically Actuated (siba44e1-a.pdf)
English
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Operating Manual - VAP Angle and VIP Inline Valves (sina98e1.pdf)
English
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