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Products:
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Electron Beam Gun Crucible Indexer |
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Vacuum Components |
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Vacuum Gauges |
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Vacuum Valves and Gas Dosing Systems |
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Angle and Inline Valves, DN 16 - 250 |
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Angle and Inline Valves, DN 5 |
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Ball Valves, DN 10-40 |
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Butterfly Valves, DN 63 to 250 ISO |
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Diaphragm Valves, Manually Actuated |
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Gas Dosing Systems |
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Gas Dosing Valves |
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ISO-KF Valves (DN 16, 25, 40), manual |
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ISO-KF Valves (DN 16, 25, 40), pneumatic and electropneumatic |
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Safety Valves |
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Venting Valves |
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Angle (VAH) and Inline (VIH) Manually Actuated Valves
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The INFICON ISO-KF valve line, VAH / VIH016...040-A/X, performs as a gauge isolation, bypass, roughing or venting valve and is well suited for all general high vacuum and semiconductor processes. The improved industrial design results in a rugged, compact, easy to operate valve. The visual position indicator shows the open / close status of the valve for clear understanding of valve status. The extremely long service life and easy to maintain design results in a highly reliable valve with low cost of ownership. The new line is compatible with the current INFICON VAH / VIH016...040-A/X valve line.
Features / Benefits
- Ergonomically designed knob for secure grip
- Fast open / close actuation with one 130 o turn; or a soft continuously variable actuation for controlled venting / pumping of vacuum systems
- Low operating force required, even if the valve is opened against vacuum
- Drive locks into final open / close position
- Visual position indicator, standard
- 316L stainless steel bellows
- Easy maintenance, fast bellows and seal replacement
- High conductance for fast pump down or venting
- High differential pressure resistance
- FPM sealing standard, other sealing materials available upon request
- High purity aluminum or stainless steel housing
INFICON also offers pneumatic and electropneumatic actuated ISO-KF Valves (DN 16, 25, 40). Click here for details.
ASSOCIATED TECHNICAL INFORMATION
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Datasheet - Angle (VAH) and Inline (VIH) Valves, Manually Actuated
English
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Operating Manual - VAH Angle and VIH Inline Valves (sinb01e1.pdf)
English
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