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>Vacuum Valves and Gas Dosing Systems

Angle (VAH) and Inline (VIH) Manually Actuated Valves


The INFICON ISO-KF valve line, VAH / VIH016...040-A/X, performs as a gauge isolation, bypass, roughing or venting valve and is well suited for all general high vacuum and semiconductor processes. The improved industrial design results in a rugged, compact, easy to operate valve. The visual position indicator shows the open / close status of the valve for clear understanding of valve status. The extremely long service life and easy to maintain design results in a highly reliable valve with low cost of ownership. The new line is compatible with the current INFICON VAH / VIH016...040-A/X valve line.

Features / Benefits
  • Ergonomically designed knob for secure grip
  • Fast open / close actuation with one 130 o turn; or a soft continuously variable actuation for controlled venting / pumping of vacuum systems
  • Low operating force required, even if the valve is opened against vacuum
  • Drive locks into final open / close position
  • Visual position indicator, standard
  • 316L stainless steel bellows
  • Easy maintenance, fast bellows and seal replacement
  • High conductance for fast pump down or venting
  • High differential pressure resistance
  • FPM sealing standard, other sealing materials available upon request
  • High purity aluminum or stainless steel housing

INFICON also offers pneumatic and electropneumatic actuated ISO-KF Valves (DN 16, 25, 40). Click here for details.

 Datasheet - Angle (VAH) and Inline (VIH) Valves, Manually Actuated
 Gebrauchsanleitung - VAH Eckventil und VIH Inline-Ventil (sinb01d1.pdf)
 Operating Manual - VAH Angle and VIH Inline Valves (sinb01e1.pdf)

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