|
Products:
|
|
| > |
Electron Beam Gun Crucible Indexer |
| > |
FabGuard Software Suite |
| > |
Guardian Co-Deposition Controller |
| > |
Leak Detectors |
| > |
Quartz Crystal Sensors |
| > |
Quartz Monitor Crystals |
| > |
RF Sensing Technology |
| > |
Residual Gas Analyzers |
| > |
Thin Film Deposition Controllers/Monitors |
| > |
Vacuum Components |
| > |
Vacuum Gauges |
| > |
Vacuum Valves and Gas Dosing Systems |
| |
| • |
Angle and Inline Valves, DN 16 - 250 |
| • |
Angle and Inline Valves, DN 5 |
| • |
Ball Valves, DN 10-40 |
| • |
Butterfly Valves, DN 63 to 250 ISO |
| • |
Diaphragm Valves, Manually Actuated |
| • |
Gas Dosing Systems |
| • |
Gas Dosing Valves |
| • |
ISO-KF Valves (DN 16, 25, 40), manual |
| • |
ISO-KF Valves (DN 16, 25, 40), pneumatic and electropneumatic |
| • |
Safety Valves |
| • |
Venting Valves |
|
| |
|
|
|
|
|
|
|
Vacuum Valves and Gas Dosing Systems
|
INFICON offers a complete line of vacuum valves, fittings and feedthroughs to meet all your vacuum applications. Our custom heated valves and fittings are specially designed for the etch exhaust lines of semiconductor manufacturing. INFICON gas-dosing controller controls pressure by communicating with INFICON vacuum gauges.
INFICON components are 100% leak tested to less than 1 X10-9 mbar-l-s. Surface finish, welds, and material specifications meet or exceed high vacuum requirements. INFICON valves, fittings and feedthroughs are available in stainless steel and aluminum and our flange design is in accordance with international standards ISO 2861, ISO 1609, and ISO 3669.
ISO-KF Valves (DN 16, 25, 40), pneumatic and electropneumatic
ISO-KF Valves (DN 16, 25, 40), manual
Angle and Inline Valves, DN 16 - 250
Angle and Inline Valves, DN 5
Diaphragm Valves, Manually Actuated
Ball Valves, DN10-40
Butterfly Valves, DN 63 to 250 ISO
Gas Dosing Valves
Gas Dosing Systems
Safety Valves
Venting Valves
|
|
|
|
|
|
|
|
|
|
See our full line
of vacuum valves and gas dosing systems.
|
|
|
|
|
