Simultaneous Deposition of Up to Eight Materials
Ideal for CIGS Thin Films
Guardian can control deposition rates from 0.1 to 10,000 Å/s. It operates one or two sensors, up to 8 optical inputs and controls up to 8 deposition sources, enabling co-deposition of up to 8 materials.
INFICON Guardian is ideal for applications such as fabrication of photovoltaic modules, OLEDs, photovoltaics, superconducting thin films and MBE.
The Guardian Co-Deposition System is based on Electron Impact Emission Spectroscopy (EIES). Click here to learn more about EIES technology.
Features at a Glance
- Monitor and control simultaneous deposition of up to 8 materials
- Deposition rates from 0.1 to 10,000 Å/s
- Integrated EIES and QCM thin film process control
- 12 relay outputs and 16 digital inputs
- Windows-based software for setup and operation
- Compatible with INFICON Sentinel® sensors
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Brochure - Guardian Co-Deposition Controller
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Configuration Guide - Guardian Co-Deposition Controller
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Operations and Maintenance Manuals:
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Operating Manual - Guardian Co-Deposition Controller
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Software:
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Software - Guardian_EIES_V5.11
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